Quote Now

MSS-P-NRL60A / NRL90A / NRL180A

Commodity name： MSS-P-NRL60A / NRL90A / NRL180A

Category:

Email:

Description

Welcome to Shanghai Mengsheng Sheng International Trade

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

▍Features
NRL series: Uniformity of low temperature distribution. Suitable for the important process of cavity's evacuation which wants to increase the flow rate and shorten the exhaust time
Low vibration and noise
Excellent in corrosion resistance
The internal components are specially treated by giving a high degree of surface hardness and corrosion resistance. This helps prevent the internal parts of pump from corrosion when exposed to corrosive gases.

▍Applications
· Evacuation of activated gas (CVD and etching, etc).
· Evacuation of inert gas (PVD, evaporation, heat treatment processes etc).
· Evacuation of gases on the process which generate powders (Si crystal growing furnaces, etc).
· Backing pump for turbo-molecular pumps and mechanical booster pumps, etc.

▍Specifications

Model ltem		NRL60A	NRL90A	NRL180A
Maximum pumping speed m³h(L/min)	50 Hz	70(1167)	116(1933)	200(3333)
	60 Hz	84(1400)	140(2333)	240(4000)
Maximum inlet pressure(Pa)		1 Atm
UIltimate pressure^*1(Pa)		5
Maximum exhaust pressure		1 Pa～1Atm
Motor (2 poles) (kW)		2.2(2)	3.7(2)	7.5(2)
Lubrication oil type		BARRIERTA J100(E) FLUID FOMBLIN YL-VAC 25/6
Oil capacity	Atomospheric cover(L)	0.5	0.7	0.6
	Vacuum cover(L)	0.3	0.6	0.8
Cooling water	Supply pressure(MPa)	0.1～0.3
	In/out difference pressure(MPa)	0.1
	Flow rate(L/min)	5
	Supply water temperature^*2(℃)	10~30
Nitrogen gas	Supply pressure(MPa)	0.1～0.5
	Regulated pressure^*3(MPa)	0.05～0.1(At running)
	Flow rate(SLM)	5^*4
Weight(kg)		128	188	268
Inlet		VG50	VG80	VG80
Outlet		NW40

*1.The limiting pressure is the value of nitrogen (sealed gas) at 5.0slm.
*2.No condensation.
*3.The value of a pressure gauge adjusted with a regulating valve.
*4.Nitrogen (sealed gas) flow 5.0 SLM is a fixed value.

▍Pumping rate curve

Pressure

▍NRL60A

▍NRL90A

▍NRL180A

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

Your satisfaction and positive feedback is very significant to us.
Thank you! Have a nice day!

Key words:

Get A Quote

Note: Please leave your email address, our professionals will contact you as soon as possible!