▍Features
Oil-free
Since no lubricating oil is used in the casing chamber, stable performance is realized even when evacuating water vapor or solvent vapors.
Special surface treatment
· The surface of the main components is hard oxidized to improve corrosion resistance and reduce internal damage of the pump body.
· This feature is optional and the surface of the standard is not processed.
Configure the inverter to shorten the exhaust time
· After the inverter is configured, it is started simultaneously with the rough pump, which effectively shortens the exhaust time compared with the standard pump.
· This accessory is optional and the standard pump is not configured.

▍Applications
· Evaporation, sputtering, ion plating, liquid crystal injector.
· Vacuum drying, freeze drying, vacuum degassing.
· Analytical instrument, sealing device.
· Vacuum heat treatment furnace, dissolution furnace.
· Various other vacuum devices

▍Performance specifications

*1.This value is measured by using a Pirani vacuum gauge. lt is approx. 6.5 x 10^-2 Pa when a Mcleod vacuum gauge is used.
* 2.This value changes depending on the performance of the fore pump. The above data is obtained when the pump is used in combination with a standard fore pump.
* 3.The temperature of inlet port cooling water must be 5~30℃ . Keep the environment that does not cause dew formation when the cooling water temperature was lower.

▍Pumping rate curve

Pressure

▍Dimensions